About us

Our Business

ULVAC-PHI, Inc. provides X-ray Photoelectron Spectroscopy (XPS) Microprobe, Secondary Ion Mass Spectrometer (TOF-SIMS, D-SIMS), and Scanning Auger Electron Spectroscopy (AES) Nanoprobe, as the world’s leading supplier of advanced UHV surface analysis instruments.

Corporate Information

We receive various opinions from our customers about everything from quality control to research and development. Listening to those opinions allows us to accommodate diverse needs through superior surface analysis technologies and an excellent after-sale service system.
ULVAC-PHI provides unique product development and cutting-edge surface analysis solutions to contribute to next-generation engineering technologies.

Company Profile

Company Name
November 1, 1982
100 million yen (as of July 2022)
Board of Directors and Auditor
Yasuhiro Hara
Executive Managing Director
Tomoyasu Suzuki
Executive Director
Atsushi Ogata
Executive Director
Haruhiko Ono
Executive Director
Shinji Takahashi
(Executive Officer of ULVAC, Inc.)
Executive Director
Dr. Ju Hoon Shin
(Executive Officer of ULVAC, Inc.)
Executive Director
Junya Kiyota
(Executive Officer of ULVAC, Inc.)
Mitsuru Yahagi
(Auditor of ULVAC, Inc.)
Office Locations
Headquarter and Factory
2500 Hagisono, Chigasaki, Kanagawa, 253-8522, Japan
TEL:+81-467-85-6522 FAX:+81-467-85-9406

Osaka Branch Office
Uemura Nissei Building 5F, 3-3-31 Miyahara, Yodogawa-ku, Osaka, 532-0003, Japan

Message from the President

Yasuhiro Hara / President ULVAC-PHI, Inc.

Supporting Technological Innovation as a Manufacturer in Surface Analysis Instruments

Analysis instruments have played an important role behind the scenes of leading edge science and technology.
Universities, research institutions, and companies are competing every day to come up with new goods and services that could change the world dramatically, including IoT (Internet of Things), secondary batteries, AI (artificial intelligence), robotics, high-performance sensors, biomedicine, and SDGs. UHV surface analysis instruments play an active role from basic to applied research in these fields. ULVAC-PHI is the world’s only leading company which handles manufacturing, development, and customer support of surface analysis instruments in Japan.

ULVAC-PHI started as an exclusive agent in Japan for Physical Electronics, Inc. during the early days of surface analysis technology in Japan. After the handover of Physical Electronics’ manufacturing technologies in 2003, ULVAC-PHI became the leading manufacturer of surface analysis instruments and has continued introducing new products and technologies to meet customers’ needs. ULVAC-PHI also established a support system with professional staffs, analysis service, training, and seminars for starters in surface analysis to fully utilize our skills accumulated and inherited from Physical Electronics. ULVAC-PHI also conducts sales, R&D, and customer service globally with our subsidiary, Physical Electronics USA.

As a manufacturer of surface analysis instruments using the Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS), Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS), and Dynamic Secondary Ion Mass Spectrometry (D-SIMS) technologies, ULVAC-PHI can offer solutions to various needs including, but not limited to, material

ULVAC-PHI is committed to providing unique and high-quality products for customers and to contribute to development of science and technology for future generations.

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